Phase composition and structure of boride, nitride, and silicide films produced by ion deposition

被引：0
|
作者：
P. I. Ignatenko
机构：
[1] Donetsk National University,
来源：
Inorganic Materials | 2008年 / 44卷
关键词：
Boride; Boron Atom; Columnar Structure; General Regularity; High Supersaturation;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
We analyze general regularities of structure and phase formation processes in boride, nitride, and silicide films in relation to the energy of atoms condensing on the substrate, substrate material, deposition technique, film growth mechanism, target composition, and deposition temperature.
引用
收藏
相关论文
共 50 条
  • [31] Nature of the transitional region during the deposition of titanium boride and nitride films on gallium arsenide
    Ermolovich, IB
    Konakova, RV
    Milenin, VV
    Senkevich, AI
    TECHNICAL PHYSICS LETTERS, 1999, 25 (10) : 789 - 791
  • [32] Cobalt nitride films produced by reactive pulsed laser deposition
    De la Cruz, W.
    Contreras, O.
    Soto, G.
    Perez-Tijerina, E.
    REVISTA MEXICANA DE FISICA, 2006, 52 (05) : 409 - 412
  • [33] Chromium nitride coatings produced by ion beam assisted deposition
    Demaree, JD
    Fountzoulas, CG
    Hirvonen, JK
    SURFACE & COATINGS TECHNOLOGY, 1996, 86 (1-3): : 309 - 315
  • [34] STRUCTURE OF BORIDE FILMS FORMED BY ION-IMPLANTATION INTO TITANIUM
    PIVIN, JC
    ZHENG, P
    RUAULT, MO
    PHILOSOPHICAL MAGAZINE LETTERS, 1989, 59 (01) : 25 - 30
  • [35] Copper nitride films produced by reactive pulsed laser deposition
    Soto, G
    Díaz, JA
    de la Cruz, W
    MATERIALS LETTERS, 2003, 57 (26-27) : 4130 - 4133
  • [36] Phase Composition, Orientation, and Substructure of Iridium Silicide Films on Silicon
    V. M. Ievlev
    S. B. Kushchev
    I. G. Rudneva
    S. A. Soldatenko
    Inorganic Materials, 2003, 39 : 472 - 478
  • [37] Phase composition, orientation, and substructure of iridium silicide films on silicon
    Ievlev, VM
    Kushchev, SB
    Rudneva, IG
    Soldatenko, SA
    INORGANIC MATERIALS, 2003, 39 (05) : 472 - 478
  • [38] The structure and phase composition of boride coatings on sintered powder steels
    Baglyuk, G. A.
    Mamonova, A. A.
    Pyatachuk, S. G.
    Sosnovskii, L. A.
    POWDER METALLURGY AND METAL CERAMICS, 2013, 52 (1-2) : 113 - 117
  • [39] The structure and phase composition of boride coatings on sintered powder steels
    G. A. Baglyuk
    A. A. Mamonova
    S. G. Pyatachuk
    L. A. Sosnovskii
    Powder Metallurgy and Metal Ceramics, 2013, 52 : 113 - 117
  • [40] STRUCTURE AND PHASE-COMPOSITION OF NICKEL BORIDE COMPOSITE COATINGS
    KOSKOV, VD
    PERMYAKOV, VG
    NOGTEV, NN
    MASICH, LG
    YAGODKINA, LM
    METAL SCIENCE AND HEAT TREATMENT, 1983, 25 (1-2) : 142 - 145
12345