Precision aspherization of the surface of optical elements by ion-beam etching

被引：7

作者：

Zorina M.V. ^{[1
]}

Nefedov I.M. ^{[1
,2
]}

Pestov A.E. ^{[1
,2
]}

Salashchenko N.N. ^{[1
]}

Churin S.A. ^{[1
,2
]}

Chkhalo N.I. ^{[1
]}

机构：

[1] Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod

[2] Lobachevsky State University of Nizhny Novgorod, pr. Gagarina 23, Nizhny Novgorod

来源：

Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques | 2015年 / 9卷 / 4期

关键词：

aspherization; imaging X-ray optics; ion etching; shape correction;

D O I：

10.1134/S1027451015040394

中图分类号：

学科分类号：

摘要：

Ion-beam methods are developed for forming supersmooth aspherical optical surfaces of polished fused quartz with a precision on the level of 3 nm relative to the standard deviation and 0.2–0.3 nm for the mean-square surface roughness in the range of spatial frequencies of 0.01–100 μm−1. © 2015, Pleiades Publishing, Ltd.

引用

页码：765 / 770

页数：5

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