Precision aspherization of the surface of optical elements by ion-beam etching

被引：7
|
作者：
Zorina M.V. [1 ]
Nefedov I.M. [1 ,2 ]
Pestov A.E. [1 ,2 ]
Salashchenko N.N. [1 ]
Churin S.A. [1 ,2 ]
Chkhalo N.I. [1 ]
机构：
[1] Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod
[2] Lobachevsky State University of Nizhny Novgorod, pr. Gagarina 23, Nizhny Novgorod
来源：
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques | 2015年 / 9卷 / 4期
关键词：
aspherization; imaging X-ray optics; ion etching; shape correction;
D O I：
10.1134/S1027451015040394
中图分类号：
学科分类号：
摘要：
Ion-beam methods are developed for forming supersmooth aspherical optical surfaces of polished fused quartz with a precision on the level of 3 nm relative to the standard deviation and 0.2–0.3 nm for the mean-square surface roughness in the range of spatial frequencies of 0.01–100 μm−1. © 2015, Pleiades Publishing, Ltd.
引用
收藏
页码：765 / 770
页数：5
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