Test object for calibrating the transmission electron microscope

被引：0

作者：

Vasil'Ev A.L. ^{[4
]}

Gavrilenko V.P. ^{[1
,3
]}

Koval'Chuk M.V. ^{[4
]}

Mityukhlyaev V.B. ^{[1
]}

Ozerin Y.V. ^{[5
]}

Rakov A.V. ^{[1
]}

Roddatis V.V. ^{[4
]}

Todua P.A. ^{[1
,3
]}

Filippov M.N. ^{[1
,2
,3
]}

机构：

[1] National Research Center of Surface and Vacuum Properties, Moscow 117334

[2] Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences, Moscow 117907

[3] Moscow Institute of Physics and Technology, State University, Dolgoprudnyi, Moscow oblast 141700

[4] Russian Research Centre, Kurchatov Institute, Moscow 123182

[5] Enterprise Mikron, Barnaul 656064

来源：

Russian Microelectronics | 2013年 / 42卷 / 03期

关键词：

15;

D O I：

10.1134/S1063739713030098

中图分类号：

学科分类号：

摘要：

A new test object for calibrating the transmission electron microscope and scanning transmission microscope is suggested. The test was fabricated by means of cutting the silicon relief structure with the attested sizes of relief elements, which allowed us to use it both in the range of large magnifications (with the direct observation of the crystal lattice) and in the range of medium (near 30000) magnifications. © 2013 Pleiades Publishing, Ltd.

引用

页码：155 / 159

页数：4

共 15 条

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