Maximum allowable load of atomic force microscope (AFM) nanorobot

In this paper, maximum load-carrying capacity algorithm is developed for atomic force microscope (AFM) nanorobot. Considering real-time control limitation for micro nano manufacture process, predicting possibility of this manufacture process is really important. Main limitation in this method is cantilever’s geometry. Finite element method is used for finding effect of variation in geometry parameters. Cantilever’s twist angle has a relationship with cantilever geometry; we use this point as a criterion for finding maximum load-carrying capacity. Changing in this parameter can be realized by optic sensor that is used in AFM nanorobot. Finite element result is used for modeling geometrical effect. Finally, an algorithm to determine maximum load-carrying capacity with considering finite element result and for different cantilever geometries is presented; thus, with using these simulations, particle size can be estimated.