A plasma generator based on nonself-sustained low-pressure glow discharge with a large-volume hollow cathode

The results of studying nonself-sustained glow discharges in an electrode system with a hollow cathode with a volume of 0.25 m3 are presented. A high-current (up to 35 A) nonself-sustained glow discharge at low pressures (0.3–1.0 Pa) is initiated and sustained with the help of an auxiliary cold-hollow-cathode arc discharge. When the current of a nonself-sustained glow discharge increases from 2 to 35 A, its burning voltage changes from 40 to 300 V. These values are much lower than the voltage for a self-sustained glow discharge in the same electrode system. At a discharge current of 30 A, the electron concentration at the center of the hollow cathode is ne ∼ 1010–1011 cm−3 and the electron temperature is Te ≈ 2 eV. The discharge considered can be used in the system for modification of materials and products.