A new method for measuring laser beam straightness error based on common-path compensation

被引：7

作者：

You F.-L. ^{[1
]}

Feng Q.-B. ^{[1
]}

Zhang B. ^{[1
]}

Zhai Y.-S. ^{[1
]}

Cao R. ^{[1
]}

Fang H.-C. ^{[1
]}

机构：

[1] Key Laboratory of Luminescence and Optical Information of Ministry of Education, Beijing Jiaotong University

来源：

Optoelectronics Letters | 2009年 / 5卷 / 05期

基金：

中国国家自然科学基金;

关键词：

Error compensation;

D O I：

10.1007/s11801-009-9013-y

中图分类号：

TN2 [光电子技术、激光技术];

学科分类号：

0803 ; 080401 ; 080901 ;

摘要：

A novel method for laser beam straightness error measurements based on common-path compensation is proposed. The basic principle of the method is described and the math-model is established. Furthermore, the influence of laser beam drift on straightness error measurements is analyzed. The experimental results show that the measurement accuracy can be greatly improved by using the common-path compensation for laser beam drift. © 2009 Tianjin University of Technology and Springer Berlin Heidelberg.

引用

页码：383 / 386

页数：3

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