Microstructure and High-Temperature Friction and Wear Properties of CrAlMoN Film

Closed-field unbalanced magnetron sputtering ion plating was used to form CrAlMoN films on the surface of single-crystal silicon and tool steel. The composition and morphology of the films were determined through energy-dispersive X-ray spectroscopy, scanning electron microscopy, and transmission electron microscopy. High-temperature friction and wear properties of CrAlMoN films were assed using a friction and wear tester and by studying the film cross-sections. The hardness of CrAlMoN films was determined using a nanoindenter. Results showed that CrAlMoN films have a nanomultilayer structure, with the same fcc structure as CrN. At room temperature, the hardness and wear resistance of CrAlMoN films are greater than that of CrAlN films. The friction properties of CrAlMoN films varied widely with an increase in the temperature. At 600 °C, the friction performance of CrAlMoN films degrades rapidly, and the degree of film wear is significantly increased. In contrast, CrAlN films retain high wear resistance at 600 °C.