Dielectric Properties of Au/SrTiO3/p-Si Structure Obtained by RF Magnetron Sputtering in a Wide Frequency Range

被引：0
作者：
Barış Kınacı
机构：
[1] Istanbul University,Department of Physics, Faculty of Science
[2] Gazi University,Photonics Research Center
来源：
Silicon | 2022年 / 14卷
关键词：
SrTiO; Dielectric properties; Frequency; Negative dielectric constant;
D O I：
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学科分类号：
摘要：
Dielectric properties of Au/p–Si structure with Strontium titanate (SrTiO3) interlayer were examined in the frequency range of 100–900 kHz (by step 100 kHz). SrTiO3 thin film was deposited on p-type Si substrate using radio frequency (RF) magnetron sputtering method at a substrate temperature of 500 °C. Dielectric parameters such as dielectric constant (ε′), dielectric loss (ε′′), real modulus (M′), imaginary modulus (M′′), and electrical conductivity (σac) of the Au/SrTiO3/p-Si structure were calculated by evaluating the results obtained from admittance spectroscopy in the frequency range of 100–900 kHz by step 100 kHz. According to the obtained results, ε′ values take negative values as a result of depending on frequency measurements.
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页码：2717 / 2722
页数：5
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