Full-band particle-based analysis of device scaling for 3D tri-gate FETs

被引:0
作者
Chiney P. [1 ]
Branlard J. [1 ]
Aboud S. [2 ]
Saraniti M. [1 ]
Goodnick S. [3 ]
机构
[1] Electrical and Computer Engineering Department, Illinois Institute of Technology, Chicago
[2] Electrical and Computer Engineering Department, Worcester Polytechnic Institute, Worcester
[3] Department of Electrical Engineering, Arizona State University, Tempe
关键词
Frequency analysis; Monte Carlo simulation; Omega FET; p-FETs; Scaling; Tri-gate FETs;
D O I
10.1007/s10825-005-7105-x
中图分类号
学科分类号
摘要
In this work, a 25 nm gate length three-dimensional tri-gate SOI FET with a wrap around gate geometry is studied using a full-band particle-based simulation tool. The tri-gate FETs have shown superior scalability over planar device structures, reduction of short channel effects, higher drive currents and excellent gate-channel controllability compared to their planar counterparts. Simulations were performed by scaling the length and the width of the tri-gate SOI FET channel to study its short-channel and short-width effects. The influence of the scaling on the dynamic response has also been explored by performing a frequency analysis on the device. © 2005 Springer Science + Business Media, Inc.
引用
收藏
页码:45 / 49
页数:4
相关论文
共 13 条
  • [1] Park J.-T., Colinge J.-P., Multiple-gate SOI MOSFETs: Device Design Guidelines, IEEE Transactions on Electron Devices, 49, 12, (2002)
  • [2] Doyle B.S., Datta S., Doczy M., Hareland S., Jin B., Kavalieros J., Linton T., Murthy A., Rios R., Chau R., High Performance Fully-Depleted Tri-Gate CMOS Transistors, IEEE Electrron Device Letters
  • [3] Choi Y.-K., Chang L., Ranade P., King T.-J., Bokor J., Lee S., Ha D., Balasubramaniam S., Agarwal A., Ameen M., Finfet Process requirements for improved mobility and gate work Function engineering, IEDM
  • [4] Saraniti M., Goodnick S.M., Hybrid full-band cellular automation Monte Carlo approach for fast simulation of charge transport in semiconductors, IEEE Transaction on Electron Devices, 47, (2000)
  • [5] Saraniti M., Goodnick S.M., Wigger S.J., Proceedings of Third Int. Conf. on Modeling and Simulation of Microsystem
  • [6] Yang F.-L., Et al., 25 nm CMOS omega FETs, IEEE International Electron Device Meeting Technical Digest, (2002)
  • [7] Barker J.R., Watling J.R., Simulation of enhanced interface trapping due to carrier dynamics in warped valence bands in SiGe devices, Computational Electronics, 2000. Book of Abstracts, (2000)
  • [8] Branlard J., Aboud S., Osuch P., Goodnick S., Saraniti M., Frequency analysis of semiconductor devices using full-band Cellular Monte Carlo simulations, Monte Carlo Methods and Applications, 10, 3-4, (2004)
  • [9] Branlard J., Aboud S., Goodnick S., Saraniti M., Frequency analysis of 3D GaAs MESFET structures using full-band particle-based simulations, Journal of Computational Electronics, 2, 2-4, (2003)
  • [10] Hockney R.W., Eastwood J.W., Computer Simulation Using Particles, (1988)