Measurement technique for depth profiling in time-domain low-coherence interferometer

被引:0
|
作者
Ribun Onodera
Shuhei Oshida
Yukihiro Ishii
机构
[1] University of Industrial Technology,Department of Electronics
[2] Tokyo Seimitsu Co.,Department of Applied Physics
[3] Ltd.,undefined
[4] Tokyo University of Science,undefined
来源
Optical Review | 2010年 / 17卷
关键词
low-coherence interferometer;
D O I
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中图分类号
学科分类号
摘要
A measurement technique for depth profiling in a time-domain low-coherence interferometer has been proposed. The spatial variation of the optical path caused by a diffraction grating in the Littrow configuration produces a white-light interferogram. A one-dimensional charge-coupled device (1D-CCD) detector is used to measure the undersampled white-light interferogram. The position of the reflective boundary is calculated from the rate of phase change with spatial frequency, which is based on the sub-Nyquist sampling of the white-light interferogram in the frequency domain.
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页码:171 / 175
页数:4
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