Measurement technique for depth profiling in time-domain low-coherence interferometer

被引：0
|
作者：
Ribun Onodera
Shuhei Oshida
Yukihiro Ishii
机构：
[1] University of Industrial Technology,Department of Electronics
[2] Tokyo Seimitsu Co.,Department of Applied Physics
[3] Ltd.,undefined
[4] Tokyo University of Science,undefined
来源：
Optical Review | 2010年 / 17卷
关键词：
low-coherence interferometer;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A measurement technique for depth profiling in a time-domain low-coherence interferometer has been proposed. The spatial variation of the optical path caused by a diffraction grating in the Littrow configuration produces a white-light interferogram. A one-dimensional charge-coupled device (1D-CCD) detector is used to measure the undersampled white-light interferogram. The position of the reflective boundary is calculated from the rate of phase change with spatial frequency, which is based on the sub-Nyquist sampling of the white-light interferogram in the frequency domain.
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页码：171 / 175
页数：4
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