Nanoscale investigation of deformation characteristics in a polycrystalline silicon carbide

被引:0
|
作者
D. Zhang
L. G. Zhao
A. Roy
Y.-L. Chiu
机构
[1] Loughborough University,Wolfson School of Mechanical, Electrical and Manufacturing Engineering
[2] University of Birmingham,School of Metallurgy and Materials
来源
Journal of the Australian Ceramic Society | 2020年 / 56卷
关键词
Silicon carbide; Nanoscale deformation; Focused ion beam; Irradiation damage; Fracture toughness;
D O I
暂无
中图分类号
学科分类号
摘要
In this paper, we study the mechanical behaviour of silicon carbide at the nanoscale, with a focus on the effects of grain orientation and high-dose irradiation. Grain orientation effect was studied through nanoindentation with the aid of scanning electron microscopy (SEM) and EBSD (electron backscatter diffraction) analyses. Mechanical properties such as hardness, elastic modulus and fracture toughness were assessed for different grain orientations. Increased plasticity and fracture toughness were observed during indentations on crystallographic planes which favour dislocation movement. In addition, for SiC subjected to irradiation, increases in hardness and embrittlement were observed in nanoindentations at lower imposed loads, whereas a decrease in hardness and an increase in toughness were obtained in nanoindentations at higher loads. Transmission electron microscopy (TEM) analyses revealed that the mechanical response observed at a shallow indentation depth was due to Ga ion implantation, which hardened and embrittled the surface layer of the material. With an increased indentation depth, irradiation-induced amorphization led to a decrease in hardness and an increase in fracture toughness of the material.
引用
收藏
页码:951 / 967
页数:16
相关论文
共 50 条
  • [1] Nanoscale investigation of deformation characteristics in a polycrystalline silicon carbide
    Zhang, D.
    Zhao, L. G.
    Roy, A.
    Chiu, Y. -L.
    JOURNAL OF THE AUSTRALIAN CERAMIC SOCIETY, 2020, 56 (03) : 951 - 967
  • [2] Electrical characteristics of rectifying polycrystalline silicon/silicon carbide heterojunctions
    J. P. Henning
    K. J. Schoen
    M. R. Melloch
    J. M. Woodall
    J. A. Cooper
    Journal of Electronic Materials, 1998, 27 : 296 - 299
  • [3] Electrical characteristics of rectifying polycrystalline silicon silicon carbide heterojunctions
    Henning, JP
    Schoen, KJ
    Melloch, MR
    Woodall, JM
    Cooper, JA
    JOURNAL OF ELECTRONIC MATERIALS, 1998, 27 (04) : 296 - 299
  • [4] A multiscale-indentation study of deformation and fracture in 6H polycrystalline silicon carbide
    Zhang, D.
    Zhao, L. G.
    Roy, A.
    MATERIALS SCIENCE AND TECHNOLOGY, 2020, 36 (10) : 1111 - 1124
  • [5] Investigation Into the Third Quadrant Characteristics of Silicon Carbide MOSFET
    Tang, Lei
    Jiang, Huaping
    Zhong, Xiaohan
    Qiu, Guanqun
    Mao, Hua
    Jiang, Xiaofeng
    Qi, Xiaowei
    Du, Changhong
    Peng, Qianlei
    Liu, Li
    Ran, Li
    IEEE TRANSACTIONS ON POWER ELECTRONICS, 2023, 38 (01) : 1155 - 1165
  • [6] Investigation of temporal response characteristics in silicon carbide detector
    Liu L.
    Zhang J.
    Li H.
    Ouyang X.
    Harbin Gongcheng Daxue Xuebao/Journal of Harbin Engineering University, 2022, 43 (11): : 1547 - 1552
  • [7] Size Dependence of Nanoscale Wear of Silicon Carbide
    Tangpatjaroen, Chaiyapat
    Grierson, David
    Shannon, Steve
    Jakes, Joseph E.
    Szlufarska, Izabela
    ACS APPLIED MATERIALS & INTERFACES, 2017, 9 (02) : 1929 - 1940
  • [9] Lubrication of polycrystalline silicon MEMS via a thin silicon carbide coating
    Laboriante, Ian
    Suwandi, Anton
    Carraro, Carlo
    Maboudian, Roya
    SENSORS AND ACTUATORS A-PHYSICAL, 2013, 193 : 238 - 245
  • [10] Development of Transparent Polycrystalline Beta-Silicon Carbide
    Bayya, Shyam S.
    Villalobos, Guillermo R.
    Hunt, Michael P.
    Sanghera, Jasbinder S.
    Sadowski, Bryan M.
    Aggarwal, Ishwar D.
    Cinibulk, Michael
    Carney, Carmen
    Keller, Kristin
    MATERIAL TECHNOLOGIES AND APPLICATIONS TO OPTICS, STRUCTURES, COMPONENTS, AND SUB-SYSTEMS, 2013, 8837