Investigation of GexSi1 –x/Si Nanoheterostructures Grown by Ion-Beam Deposition

被引:0
作者
D. L. Alfimova
L. S. Lunin
M. L. Lunina
I. A. Sysoev
A. S. Pashchenko
E. M. Danilina
机构
[1] Southern Scientific Center,
[2] Russian Academy of Sciences,undefined
[3] North-Caucasus Federal University,undefined
来源
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2019年 / 13卷
关键词
nanoheterostructures; ion-beam deposition; Raman spectroscopy; X-ray diffraction;
D O I
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中图分类号
学科分类号
摘要
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页码:493 / 498
页数:5
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