Hollow-cathode low-pressure arc discharges and their application in plasma generators and charged-particle sources

被引：33

作者：

Vintizenko L.G. ^{[1
]}

Grigoriev S.V. ^{[1
]}

Koval N.N. ^{[1
]}

Tolkachev V.S. ^{[1
]}

Lopatin I.V. ^{[1
]}

Schanin P.M. ^{[1
]}

机构：

[1] Institute of High Current Electronics, Siberian Branch, Russian Academy of Sciences

来源：

Russian Physics Journal | 2001年 / 44卷 / 9期

关键词：

Large Volume; Surface Modification; Technological Process; Solid Surface; Discharge Current;

D O I：

10.1023/A:1014353721504

中图分类号：

学科分类号：

摘要：

This paper presents the results of a study of hollow-cathode arc discharges which generate gas-discharge plasmas of densities 1010-10 12 cm-3 in large volumes (∼1 m3) at low pressures (10-2-1 Pa) and at discharge currents of up to 200 A. Consideration is given to the design and peculiarities of hot-cathode and cold-cathode discharge systems. The parameters of plasma generators and charged-particle sources where use is made of arc discharges are cited and the problems of the most efficient application of such systems in technological processes of solid surface modification are discussed. ©2001 Plenum Publishing Corporation.

引用

页码：927 / 936

页数：9

共 9 条

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