Preparation of ZrO2 fine particles by CVD process: Thermal decomposition of zirconium tert-butoxide vapor

被引：0

作者：

Helmi Keskinen

Pavel Moravec

Jiří Smolík

Valeri V. Levdansky

Jyrki M. Mäkelä

Jorma Keskinen

机构：

[1] Tampere University of Technology,Institute of Physics

[2] Institute of Chemical Process Fundamentals AS CR,undefined

[3] Heat and Mass Transfer Institute NASB,undefined

来源：

Journal of Materials Science | 2004年 / 39卷

关键词：

Polymer; Zirconium; Thermal Decomposition; Fine Particle; Material Processing;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：4923 / 4929

页数：6

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