Application of Solid Immersion Lens to Submicron Resolution Imaging of Nano-Scale Quantum Wells

被引:0
作者
Motoyoshi Baba
Masahiro Yoshita
Takeaki Sasaki
Hidefumi Akiyama
机构
[1] Institute for Solid State Physics,
[2] The University of Tokyo,undefined
来源
Optical Review | 1999年 / 6卷
关键词
solid immersion lens; submicron resolution imaging; nano-scale quantum wells; near-field optics; spherical aberration; spatial resolution;
D O I
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中图分类号
学科分类号
摘要
We have discussed the resolution of submicron photoluminescence (PL) imaging using a solid immersion lens (SIL), which collects an evanescent light field. We apply the SIL microscope to measure PL image of a strip-line-patterned GaAs quantum well structure at low temperature. An improved resolution beyond diffraction limit and high collection efficiency of PL are realized.
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页码:257 / 260
页数:3
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