Investigation of secondary-emission signal formation in the low-voltage SEM mode

被引：0

作者：

Kazmiruk V.V. ^{[1
]}

Kurganov I.G. ^{[1
]}

Osipov N.N. ^{[1
]}

Podkopaev A.A. ^{[1
]}

Savitskaya T.N. ^{[1
]}

机构：

[1] Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Chernogolovka, Moscow oblast

来源：

Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques | 2016年 / 10卷 / 5期

关键词：

scanning electron microscopy; secondary electron emission;

D O I：

10.1134/S1027451016050086

中图分类号：

学科分类号：

摘要：

We present the results of studying secondary-emission signal formation in a scanning electron microscope; the signal is generated by the surface microrelief under an accelerating voltage of 0.3–3 kW with the detection of all secondary electrons. © 2016, Pleiades Publishing, Ltd.

引用

页码：887 / 891

页数：4

共 5 条

[1] Aristov V.V., Dreomova N.N., Firsova A.A., Kazmiruk V.V., Samsonovich A.V., Ushakov N.G., Zaitsev S., Scanning, 13, (1991)
[2] Kaz'miruk V.V., Savitskaya T.N., Bull. Russ. Acad. Sci.: Phys., 74, 7, (2010)
[3] Lowney J.R., Marx E., Semiconductor Measurement Technology. User’s Manual for the Program MONSEL- I: Monte Carlo Simulation of SEM Signals for Linewidth Metrology, pp. 400-495, (1994)
[4] Kieft E., Bosch E., J. Phys. D: Appl. Phys., 41, (2008)
[5] Joy D.C., Scanning, 17, (1995)

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