Frequency dispersion of tantalum oxide films

被引：0
作者：
A. A. Barybin
Yu. A. Bystrov
A. E. Komlev
A. V. Mezenov
V. I. Shapovalov
机构：
[1] St. Petersburg State Electrotechnical University,
来源：
Technical Physics Letters | 2006年 / 32卷
关键词：
Oxide; Thin Film; Quartz; Optical Property; Glass Substrate;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The optical properties of thin films of tantalum oxide deposited by reactive magnetron sputtering onto optical quartz glass substrates have been studied. It is established that nanodimensional structural inhomogeneities present in the films significantly influence the results of determination of the dispersion of optical characteristics of tantalum oxide films from their experimental transmission spectra.
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页码：79 / 81
页数：2
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