Nanoscale modification of silicon and germanium surfaces exposed to low-energy helium plasma

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作者：
Matt Thompson
Luke Magyar
Cormac Corr
机构：
[1] Australian National University,Research School of Physics and Engineering
来源：
Scientific Reports | / 9卷
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摘要：
Complex surface nanostructures were observed in germanium and silicon samples exposed to low energy (24 or 36 eV ion kinetic energy) helium plasma. Pyramidal growth is observed in germanium across the temperature range studied (185 °C to 336 °C), while significant modification in silicon was only observed at 630 °C. Nano-wire growth was observed in both germanium and silicon, and appears to be linked to the strength of the electric field, which in turn determines the implantation energy of the helium ions. Nanostructure formation is proposed to be driven by surface adatom migration which is strongly influenced by an Ehrlich-Schwoebel-type surface instability. The role of helium in this model is to drive germanium interstitial formation by ejecting germanium atoms from lattice sites, leading to germanium interstitial diffusion towards the sample surface and subsequent adatom and surface nanostructure formation.
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  • [1] Nitta N(2015)Li-ion battery materials: present and future Mater. Today 18 252-264
  • [2] Wu F(2015)Defect production and deuterium retention in quasi-homogeneously damaged tungsten Nucl. Instruments Methods Phys. Res. Sect. B Beam Interact. with Mater. Atoms 351 23-26
  • [3] Lee JT(2017)Broadband anti-reflection coating using dielectric Si3N4 nanostructures. Application to amorphous-Si-H solar cells Opt. Commun. 390 130-136
  • [4] Yushin G(2016)Metal-Organic Framework-Derived Honeycomb-Like Open Porous Nanostructures as Precious-Metal-Free Catalysts for Highly Efficient Oxygen Electroreduction Adv. Mater. 28 6391-6398
  • [5] Liu F(2017)A review of TiO Int. J. Hydrogen Energy 42 8418-8449
  • [6] Elshorbagy MH(2016) nanostructured catalysts for sustainable H Jpn. J. Appl. Phys. 55 120301-12
  • [7] Abdel-Hady K(2009) generation Nucl. Fusion 49 95005-470
  • [8] Kamal H(2015)Nanostructure formation on silicon surfaces by using low energy helium plasma exposure Nucl. Fusion 55 93033-270
  • [9] Alda J(2018)Formation process of tungsten nanostructure by the exposure to helium plasma under fusion relevant plasma conditions Nucl. Fusion 58 126034-71
  • [10] Zhu Q-L(2013)Tungsten ‘fuzz’ growth re-examined: the dependence on ion fluence in non-erosive and erosive helium plasma Nucl. Fusion 53 73015-4
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