Refractive X-Ray Lenses Made by the Two-Photon Laser Lithography Method

被引:0
作者
A. D. Patolyatov
D. A. Shcherbakov
D. A. Kolymagin
R. P. Matital
D. A. Chubich
A. G. Vitukhovsky
机构
[1] Moscow Institute of Physics and Technology (National Research University),
[2] Lebedev Physical Institute,undefined
[3] Russian Academy of Sciences,undefined
来源
Physics of Wave Phenomena | 2022年 / 30卷
关键词
X-ray optics; compound refractive X-ray lenses (CRLs); microlenses; two-photon laser lithography; voxel;
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:325 / 329
页数:4
相关论文
共 50 条
  • [41] On the Problem of the Metrology of Refractive X-ray Optics
    Lyatun, I. I.
    Goikhman, A. Yu.
    Ershov, P. A.
    Snigireva, I. I.
    Snigirev, A. A.
    JOURNAL OF SURFACE INVESTIGATION, 2015, 9 (03): : 446 - 450
  • [42] Development of Field Alignment Methods for Electron-Вeam Lithography in the Case of X-Ray Bragg–Fresnel Lenses
    Knyazev M.A.
    Svintsov A.A.
    Fahrtdinov R.R.
    Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, 2018, 12 (5) : 957 - 960
  • [43] Laboratory and synchrotron tests of two-dimensional parabolic X-ray compound refractive lens made of single-crystal diamond
    Polikarpov, M.
    Barannikov, A.
    Zverev, D.
    Terentiev, S. A.
    Polyakov, S. N.
    Zholudev, S. I.
    Martyushov, S. Yu.
    Denisov, V. N.
    Kornilov, N. V.
    Snigireva, I.
    Blank, V. D.
    Snigirev, A.
    ADVANCES IN LABORATORY-BASED X-RAY SOURCES, OPTICS, AND APPLICATIONS V, 2016, 9964
  • [44] Maskless X-Ray Lithography Based on Microoptical Electromechanical Systems and Microfocus X-Ray Tubes
    Salashchenko N.N.
    Chkhalo N.I.
    Dyuzhev N.A.
    Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, 2018, 12 (5) : 944 - 952
  • [45] Combining flat crystals, bent crystals and compound refractive lenses for high-energy X-ray optics
    Shastri, SD
    JOURNAL OF SYNCHROTRON RADIATION, 2004, 11 : 150 - 156
  • [46] Fabrication of Compound Refractive Lens using Soft and Deep X-ray Lithography Beamline on Indus-2
    Dhamgaye, V. P.
    Lodha, G. S.
    SOLID STATE PHYSICS, PTS 1 AND 2, 2012, 1447 : 525 - 526
  • [47] Imaging with multi-prism x-ray lenses
    Fredenberg, Erik
    Cederstrom, Bjorn
    Aslund, Magnus
    Nillius, Peter
    Lundqvist, Mats
    Danielsson, Mats
    MEDICAL IMAGING 2008: PHYSICS OF MEDICAL IMAGING, PTS 1-3, 2008, 6913
  • [48] Diffraction Losses in a Stack of Diamond X-Ray Lenses
    Klimova, Nataliya
    Snigirev, Anatoly
    PHOTONICS, 2024, 11 (12)
  • [49] Mirror design and alignment for X-ray lithography beamlines
    Kuroda, K
    Kaneko, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1995, 34 (12B): : 6764 - 6769
  • [50] High uniformity collimator for x-ray proximity lithography
    Cash, W
    EUV, X-RAY, AND NEUTRON OPTICS AND SOURCES, 1999, 3767 : 59 - 66