Fast exothermic processes in porous silicon

被引:0
|
作者
S. K. Lazarouk
A. V. Dolbik
P. V. Jaguiro
V. A. Labunov
V. E. Borisenko
机构
[1] Belarussian State University of Informatics and Radioelectronics,
来源
Semiconductors | 2005年 / 39卷
关键词
Oxidation; Silicon; Nitrate; Combustion; Potassium;
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学科分类号
摘要
It is found that rapid oxidation of porous Si (por-Si) layers in air may occur in the form of combustion or explosion. Combustion occurs in por-Si layers thinner than 60 μm and impregnated with potassium nitrate, while explosion is observed in thicker porous layers. It is suggested that explosion develops by a thermal mechanism resulting from an exponential increase in the reaction rate with temperature.
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页码:881 / 883
页数:2
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