Chemical Composition and Mechanical Properties of Coatings Based on TiN Formed Using a Condensation with Ion Bombardment

被引：0
|
作者：
P. M. Korusenko
S. N. Nesov
S. N. Povoroznyuk
P. V. Orlov
D. N. Korotaev
K. N. Poleshchenko
机构：
[1] Omsk State Technical University,
[2] Omsk Scientific Center,undefined
[3] Siberian Branch,undefined
[4] Russian Academy of Sciences,undefined
[5] Siberian State Automobile and Highway University,undefined
来源：
Protection of Metals and Physical Chemistry of Surfaces | 2020年 / 56卷
关键词：
coatings; titanium nitride, condensation with ion bombardment, condensation with ion bombardment, X-ray photoelectron spectroscopy, XPS, ion sputtering;
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页码：539 / 548
页数：9
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