Modern Scanning Electron Microscopy. 1. Secondary Electron Emission

被引：0
作者：
Yu. A. Novikov
机构：
[1] Prokhorov General Physics Institute of the Russian Academy of Sciences,
来源：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2023年 / 17卷
关键词：
scanning electron microscopy; secondary electron emission; mechanisms of emission; ionization mechanism; shake-off effect; slow secondary electrons; backscattered electrons; Monte Carlo method;
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摘要：
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页码：598 / 611
页数：13
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