Lonsdaleite diamond growth on reconstructed Si (100) by hot-filament chemical vapor deposition (HFCVD)

被引:0
作者
Chu Van Chiem
Hyung-Kee Seo
Shafeeque G. Ansari
Gil-Sung Kim
Jae Myung Seo
Hyung-Shik Shin
机构
[1] Chonbuk National University,School of Chemical Engineering
[2] Chonbuk National University,Department of Physics
来源
Korean Journal of Chemical Engineering | 2003年 / 20卷
关键词
Lonsdaleite; Diamond; HFCVD; Surface Reconstruction;
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中图分类号
学科分类号
摘要
In this paper, the growth of Lonsdaleite diamond using hot-filament chemical vapor deposition (HFCVD) on flashed and reconstructed Si (100) is reported. Surface morphology studies using scanning electron microscopy (SEM) show that the film is composed of decahedron and icosahedron diamond particles. The X-ray diffraction (XRD) pattern has a strongest peak at 47° and a peak at 41°, which is indicative of Lonsdaleite nature of the grown diamond film. The Raman spectrum of the film shows a broadened diamond peak at wave number of 1,329 cm−1, which has shifted towards the peak position corresponding to Lonsdaleite nature of the diamond (1,326 cm−1).
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页码:1154 / 1157
页数:3
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