Neutron Reflectometry Studies of ZnO Films

被引:0
作者
Zhaketov V.D. [1 ]
Chitanu E. [2 ]
Nikitenko Y.V. [1 ]
机构
[1] Joint Institute for Nuclear Research, Dubna, Moscow oblast
[2] National Institute for Electrical Engineering ICPE-CA, Bucharest
来源
Journal of Surface Investigation | 2018年 / 12卷 / 04期
关键词
neutron reflectometry; quasiperiodic structures;
D O I
10.1134/S1027451018040195
中图分类号
学科分类号
摘要
Textured Al-doped ZnO films are studied using neutron reflectometry. The films are quasiperiodic structures with a period of several nanometers. The films are inhomogeneous in a surface layer with a thickness of 10–20 nm. © 2018, Pleiades Publishing, Ltd.
引用
收藏
页码:658 / 664
页数:6
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