P-type carbon doping of GaSb

被引:0
|
作者
R. Wiersma
J. A. H. Stotz
O. J. Pitts
C. X. Wang
M. L. W. Thewalt
S. P. Watkins
机构
[1] Simon Fraser University,Department of Physics
来源
Journal of Electronic Materials | 2001年 / 30卷
关键词
Metalorganic vapor phase epitaxy; carbon doping; GaSb; carbon tetrachloride; photoluminescence; acceptor binding energy;
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学科分类号
摘要
The growth of carbon-doped GaSb by MOVPE has never been reported to our knowledge, despite increasing interest in carbon-doped GaAsSb alloys for heterojunction bipolar transistor applications. In this work, we report the use of carbon tetrachloride (CCl4) in conjunction with triethylgallium (TEGa) and trimethylantimony (TMSb) to achieve p-type doping levels in GaSb from 5 1016 cm−3 to greater than 1019 cm−3. High resolution x-ray diffraction measurements confirm that the effect of carbon on the lattice parameter is significant for hole concentrations above 1 1019 cm−3 as in the case of GaAs. By introducing controlled low doping levels of carbon into thick homoepitaxial samples, we have succeeded in identifying a carbon-related low temperature photoluminescence band at 795 meV, which we ascribe to band-to-acceptor transitions of carbon acceptors. Temperature-dependent Hall measurements on lightly carbon-doped samples yield somewhat lower binding energies than the spectroscopic data due to impurity banding in the acceptor excited states.
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页码:1429 / 1432
页数:3
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