Micromechanical three-axial tactile force sensor for micromaterial characterisation

被引：43

作者：

Bütefisch S. ^{[1
]}

Büttgenbach S. ^{[1
]}

Kleine-Besten T. ^{[1
]}

Brand U. ^{[1
]}

机构：

[1] Phys.-Tech. Ba., Braunschweig, D-38116 Braunschweig

来源：

Microsystem Technologies | 2001年 / 7卷 / 4期

关键词：

Silicon; Spring Constant; Force Sensor; Material Characterisation; Dimensional Metrology;

D O I：

10.1007/s005420000083

中图分类号：

学科分类号：

摘要：

A three-axial tactile force sensor for the investigation of micromechanical structures has been developed using silicon micromachining technology. The sensor is capable of performing mechanical micro material characterisation such as the determination of the spring constant of complex micromechanical structures. Another application for this sensor is dimensional metrology where it has been tested as a 3D probe in a test set-up for coordinate measurements.

引用

页码：171 / 174

页数：3

共 5 条

[1]

Butefisch S., Dauer S., Buttgenbach S., Silicon three-axial tactile sensor for the investigation of micromechanical structures, Proc 9th Int Trade Fair and Conference for Sensors, Transducers & Systems (Sensor' 99), 2, pp. 321-326, (1999)

[2]

Buttgenbach S., Mikromechanik - Einführung in technologie und anwendung, Teubner, 2.ed., (1994)

[3]

Kleine-Besten T., Loheide S., Brand U., Butefisch S., Buttgenbach S., Development and characterization of new probes for dimensional metrology on microsystem components, Proc 1st Int Conf and General Meeting of the European Society for Precision Engineering and Nanotechnology, 2, pp. 387-390, (1999)

[4]

Schwenke H., Weiskirch C., Kunzmann H., Opto-taktiler sensor zur 2D-und 3D-messung kleiner strukturen mit koordinatenmeßgeräten, Technisches Messen, 12-99, pp. 485-489, (1999)

[5]

Dauer S., Buttgenbach S., Ehlert A., Rapid prototyping of micromechanical devices using a Q-switched Nd:YAG laser with optional frequency doubling, Proc Eurosensors, 12, pp. 7-10, (1998)

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