Virtual scanning electron microscope: 2. Principles of instrument construction

被引：2
作者：
Novikov Y.A. [1 ,2 ]
机构：
[1] A.M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow
[2] Moscow Engineering Physics Institute, National Research Nuclear University MEPhI, Moscow
来源：
Journal of Surface Investigation | 2015年 / 9卷 / 03期
关键词：
imitation; method of statistical modeling; Monte Carlo method; scanning electron microscope; simulation; virtual scanning electron microscope;
D O I：
10.1134/S1027451015030325
中图分类号：
O212 [数理统计];
学科分类号：
摘要：
The principles of the construction of a virtual scanning electron microscope (SEM) are discussed. It is demonstrated that such a microscope cannot be created using a imitator of real SEM operation. It is concluded that a virtual SEM must be developed using a simulator of information similar to that which is obtained by means of a real microscope. The possibilities of reducing the time required to generate micro- and nanostructure images to values comparable with the imaging duration of real SEMs are analyzed. © 2015, Pleiades Publishing, Ltd.
引用
收藏
页码：604 / 611
页数：7
相关论文
共 21 条
[1]  
Postek M.T., Vladar A.E., New York, Basel, 2001
[2]  
Novikov Y.A., Rakov A.V., Russ. Microelectron., 25, (1996)
[3]  
Hatsuzawa T., Toyoda K., Tanimura Y., Rev. Sci. Instrum., 61, (1990)
[4]  
Novikov Y.A., J. Surf. Invest.: X-ray, Synchrotron Neutron Tech., 8, (2014)
[5]  
Joy D.C., Monte Carlo Modeling for Electron Microscopy and Microanalysis, (1995)
[6]  
Novikov Y.A., Surf.: Phys., Chem., Mech., 11, (1995)
[7]  
Frase C.G., Gnieser D., Bosse H., J. Phys. D: Appl. Phys., 42, (2009)
[8]  
Li Y.G., Mao S.F., Ding Z.J., Ed. by S, Mordechai (InTech, 2011
[9]  
Brandes G.R., Canter K.F., Horsky T.N., Lippel P.H., Mills A.P., Rev. Sci. Instrum., 59, (1988)
[10]  
Novikov Y.A., Rakov A.V., Surf. Invest., 15, (2000)
123