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A system for monitoring the ion current in the ILU-3 implanter
被引：0
作者：
V. I. Nuzhdin
V. F. Valeev
D. A. Konovalov
V. Yu. Petukhov
机构：
[1] Russian Academy of Sciences,Zavoiskii Physical Technical Institute, Kazan Scientific Center
来源：
Instruments and Experimental Techniques
|
2011年
/
54卷
关键词：
Charged Particle Beam;
Input Diaphragm;
Horizontal Sweep;
Collector Wall;
Secondary Elec Trons;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The design of a small device for detecting charged particles and a system for monitoring the ion-beam current are described. The system contains several sensors for ion-current measurements, thus increasing the information content and making it possible to visualize the processes of implantation and monitoring of the ion-beam parameters, and allows adjustment of the ion-bombardment regimes directly during implantation.
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页码：729 / 731
页数：2
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