High Quality Oxide Films Deposited at Room Temperature by Ion Beam Sputtering

被引：0

作者：

Gerard E. Henein

Juraj Topolancik

Kerry Siebein

机构：

[1] National Institute of Standards and Technology,Center for Nanoscale Science and Technology

[2] Roche Sequencing Solutions,undefined

来源：

MRS Advances | 2018年 / 3卷 / 4期

关键词：

D O I：

10.1557/adv.2018.157

中图分类号：

学科分类号：

摘要：

We have deposited dense and pinhole-free thin films of SiO2, Al2O3 and ITO at room temperature via ion beam sputtering. The SiO2 films were found to be of similar quality as thermal oxide with a resistivity greater than 1015 Ω·cm and breakdown field in excess of 7 MV/cm. The Al2O3 films were part of a Pt- Al2O3-Pt vertical tunnel junction and were kept extremely thin, from 2 nm to 4 nm. The current-voltage characteristics of these junctions indicated a breakdown field in excess of 20 MV/cm, roughly twice that achieved by ALD films. This breakdown voltage was found to be independent of junction area, strongly suggesting the absence of pinholes in the film. The ITO films were 50 nm to 100 nm thick. As deposited, they are fully transparent with an electrical resistivity of 5x10-4 Ω·cm.

引用

页码：219 / 224

页数：5

共 50 条

[31] Ferroelectric properties of SBN thin films deposited by ion beam sputtering [J].

Lee, DG ;

Jang, JH ;

Kim, JJ ;

Cho, SH ;

Lee, HY .

FERROELECTRICS, 2004, 304 :1003-1007

[32] Texture in ITO films deposited at oblique incidence by ion beam sputtering [J].

Lacroix, Bertrand ;

Paumier, Fabien ;

Santos, Antonio J. ;

Maudet, Florian ;

Girardeau, Thierry ;

Dupeyrat, Cyril ;

Garcia, Rafael ;

Morales, Francisco M. .

APPLIED SURFACE SCIENCE, 2022, 605

[33] Deposition rate of IBS (ion-beam sputtering) deposited Pt films at different substrate temperature [J].

Shanghai Inst of Optics and Fine, Mechanics, Shanghai, China .

Zhongguo Jiguang, 10 (893-896)

[34] Room temperature growth of indium oxide films by reactive ion beam assisted deposition [J].

Wang, Kai ;

Vygranenko, Yuriy ;

Nathan, Arokia .

THIN-FILM COMPOUND SEMICONDUCTOR PHOTOVOLTAICS - 2007, 2007, 1012 :95-+

[35] Effect of argon ion beam voltages on the microstructure of aluminum nitride films prepared at room temperature by a dual ion beam sputtering system [J].

Chen, HY ;

Han, S ;

Cheng, CH ;

Shih, HC .

APPLIED SURFACE SCIENCE, 2004, 228 (1-4) :128-134

[36] Highly textured zinc oxide films by room temperature ion beam assisted deposition [J].

Koehl, D. ;

Luysberg, M. ;

Wuttig, M. .

PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 2009, 3 (7-8) :236-238

[37] Adhesive characteristics of Fe films deposited by ion beam sputtering with Ar ion bombardment [J].

Iwatsubo, S ;

Takahashi, T ;

Naoe, M .

THIN SOLID FILMS, 1999, 343 :261-264

[38] Ion implantation and ion beam analysis of MOD deposited oxide films [J].

Marko, X. ;

Talagala, P. ;

Sahana, M. B. ;

Naik, R. ;

Padmanabhan, K. R. ;

Marques, C. P. ;

Alves, E. .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2007, 261 (1-2) :456-460

[39] Electrical and structural properties of tin-doped indium oxide films deposited by DC sputtering at room temperature [J].

Song, Pung Keun ;

Shigesato, Yuzo ;

Kamei, Masayuki ;

Yasui, Itaru .

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1999, 38 (5 A) :2921-2927

[40] Electrical and structural properties of tin-doped indium oxide films deposited by DC sputtering at room temperature [J].

Song, PK ;

Shigesato, Y ;

Kamei, M ;

Yasui, I .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (5A) :2921-2927

← 1 2 3 4 5 →