Sol-Gel Prepared Glass for Refractive and Diffractive Micro-Optical Elements and Arrays

被引：0
|
作者：
Y. Haruvy
I. Gilath
M. Maniewictz
N. Eisenberg
机构：
[1] SOREQ NRC,
[2] JCT,undefined
来源：
Journal of Sol-Gel Science and Technology | 1998年 / 13卷
关键词：
sol-gel; fast; micro-optics; patterning; replication;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The fast sol-gel method enables facile preparation of siloxane-based glassy matrices, in which polymerization is completed within minutes and volume changes <5% take place upon curing. Single-face and two-face replication of micro-optical arrays have been obtained, as well as crack-free elements >10 mm thick. Minimizing shrinkage and enabling relaxation of the drying sol-gel are key factors in the elimination of cracking. These features and the resulting optical quality of the glass make this method technologically and economically attractive for replication-produced micro-lenses and micro-optical arrays.
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页码：547 / 551
页数：4
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