Ultrathin compound semiconductor on insulator layers for high-performance nanoscale transistors

被引:0
|
作者
Hyunhyub Ko
Kuniharu Takei
Rehan Kapadia
Steven Chuang
Hui Fang
Paul W. Leu
Kartik Ganapathi
Elena Plis
Ha Sul Kim
Szu-Ying Chen
Morten Madsen
Alexandra C. Ford
Yu-Lun Chueh
Sanjay Krishna
Sayeef Salahuddin
Ali Javey
机构
[1] Electrical Engineering and Computer Sciences,Materials Sciences Division
[2] University of California,Electrical and Computer Engineering Department
[3] Lawrence Berkeley National Laboratory,undefined
[4] Berkeley Sensor and Actuator Center,undefined
[5] University of California,undefined
[6] Materials Science and Engineering,undefined
[7] National Tsing Hua University,undefined
[8] Hsinchu 30013,undefined
[9] Taiwan ,undefined
[10] and Center for High Technology Materials,undefined
[11] University of New Mexico,undefined
[12] Present address: School of Nanotechnology and Chemical Engineering,undefined
[13] Ulsan National Institute of Science and Technology,undefined
[14] Ulsan Metropolitan City,undefined
[15] South Korea.,undefined
来源
Nature | 2010年 / 468卷
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摘要
Compound semiconductor materials such as gallium arsenide and indium arsenide have outstanding electronic properties, but are costly to process and cannot, on their own, compete with silicon when it comes to low-cost fabrication. But as the relentless miniaturization of silicon electronics is reaching its limits, an alternative route of enhanced device performance is becoming more attractive: the integration of compound semiconductors within silicon. Ali Javey and colleagues now present a promising new concept to integrate ultrathin layers of single-crystal indium arsenide on silicon-based substrates with an epitaxial transfer method, a technique borrowed from large-area optoelectronics. With this technique, involving the use of an elastomeric stamp to lift off indium arsenide nanowires and transfer them to a silicon-based substrate, the authors fabricate thin film transistors with excellent device performance.
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页码:286 / 289
页数:3
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