High-efficiency 2 kW XeCl excimer laser

被引：0
|
作者：
K. Haruta
Y. Saito
M. Inoue
Y. Sato
S. Fujikawa
A. Suzuki
H. Nagai
机构：
[1] Vision 21 New Business Development Center,
[2] Mitsubishi Electric Corporation,undefined
[3] 2-2-3 Marunouchi Chiyoda-ku,undefined
[4] Tokyo 100,undefined
[5] Japan (Fax: +81-3/3218-3124,undefined
[6] E-mail: harutaky@ebd.hon.melco.co.jp),undefined
[7] Advanced Technology R&D Center,undefined
[8] Mitsubishi Electric Corporation,undefined
[9] 8-1-1 Tsukaguchi-honmachi,undefined
[10] Amagasaki 661,undefined
[11] Japan,undefined
[12] Corporate Total Productivity Management & Environmental Programs,undefined
[13] Mitsubishi Electric Corporation,undefined
[14] 2-2-1 Minatomirai Nishi-ku,undefined
[15] Yokohama,undefined
[16] Kanagawa 220-81,undefined
[17] Japan,undefined
来源：
Applied Physics B | 1999年 / 68卷
关键词：
PACS: 42.55;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
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收藏
页码：663 / 669
页数：6
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