Numerical Simulation of Thermal Processes and the Effect of Heating of Near-Surface Layers of Titanium on the Diffusion Transfer of Dopants during High-Intensity Pulsed Ion Implantation

被引：0
作者：
A. I. Ivanova
G. A. Bleykher
机构：
[1] National Research Tomsk Polytechnic University,
来源：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2023年 / 17卷
关键词：
arc discharge; ion implantation; energy impact; modification of surface; near-surface layers; numerical simulation; titanium; self-diffusion; thermal processes; dynamics of temperature fields; radiation-stimulated diffusion; deep ion doping;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1458 / 1462
页数：4
相关论文
共 45 条
  • [1] Komarov F. F.(2003)Phys.— Usp. 46 1253-undefined
  • [2] Valiev S. H.(1997)Nucl. Instrum. Methods Phys. Res Sect. B. 127–128 265-undefined
  • [3] Pugacheva T. S.(1978)undefined Surf. Sci. 72 253-undefined
  • [4] Jurabekova F. G.(1983)undefined J. Appl. Phys. 54 4235-undefined
  • [5] Lem S. A.(1980)undefined J. Appl. Phys. 51 4444-undefined
  • [6] Miyagawa Y.(1978)undefined J. Nucl. Mater. 69–70 386-undefined
  • [7] Ho P. S.(1998)undefined Rev. Sci. Instrum. 69 810-undefined
  • [8] Miotello A.(1970)undefined Phys. Fluids 13 2532-undefined
  • [9] Mazzoldi P.(1997)undefined Surf. Coat. Technol. 93 158-undefined
  • [10] Eltoukhy A. H.(1996)undefined Surf. Coat. Technol. 83 218-undefined
12345