A Thin-Film Piezoelectric Pressure Sensor

被引:0
|
作者
A. A. Kazaryan
机构
来源
Measurement Techniques | 2002年 / 45卷
关键词
Physical Chemistry; Analytical Chemistry; Experimental Investigation; Pressure Sensor; Piezoelectric Pressure Sensor;
D O I
暂无
中图分类号
学科分类号
摘要
The results of a theoretical and experimental investigation of thin-film piezoelectric pressure sensors are presented.
引用
收藏
页码:515 / 518
页数:3
相关论文
共 50 条
  • [1] A thin-film piezoelectric pressure sensor
    Kazaryan, AA
    MEASUREMENT TECHNIQUES, 2002, 45 (05) : 515 - 518
  • [2] A Thin-Film Capacitance Pressure Sensor
    A. A. Kazaryan
    E. V. Strel’tsov
    Measurement Techniques, 2015, 57 : 1403 - 1410
  • [3] A Thin-Film Capacitance Pressure Sensor
    Kazaryan, A. A.
    Strel'tsov, E. V.
    MEASUREMENT TECHNIQUES, 2015, 57 (12) : 1403 - 1410
  • [4] OBSERVATION OF THIN-FILM MAGNETOSTRICTION USING A PIEZOELECTRIC SENSOR
    SHIN, YD
    LEE, YH
    RHEE, JR
    IEEE TRANSACTIONS ON MAGNETICS, 1993, 29 (06) : 3025 - 3027
  • [5] Vacuum pressure thermal thin-film sensor
    Berlicki, TM
    Osadnik, SJ
    Prociów, EL
    VACUUM, 1999, 53 (3-4) : 373 - 376
  • [6] Vacuum pressure thermal thin-film sensor
    Berlicki, T.M.
    Osadnik, S.J.
    Prociów, E.L.
    Vacuum, 1999, 53 (03): : 373 - 376
  • [7] A fast thin-film electret pressure sensor
    Ahtiainen S.T.
    Olkkonen H.
    Tiitta M.
    Recent Patents on Electrical Engineering, 2010, 3 (01) : 45 - 50
  • [8] A New Thin-film Piezoelectric Sensor for Easuring Methane Gas
    Tong, Minming
    Li, Ying
    Tang, Shoufeng
    Han, Fei
    MATERIAL SCIENCE AND ENGINEERING TECHNOLOGY, 2012, 462 : 619 - +
  • [9] Biocompatible composite thin-film wearable piezoelectric pressure sensor for monitoring of physiological and muscle motions
    Kim, Nam-In
    Lee, Jong Moon
    Moradnia, Mina
    Chen, Jie
    Pouladi, Sara
    Yarali, Miad
    Kim, Yeon
    Kwon, Min-Ki
    Lee, T. Randall
    Ryou, Jae-Hyun
    SOFT SCIENCE, 2022, 2 (02):
  • [10] Thin-film piezoelectric MEMS
    Eom, Chang-Beom
    Trolier-McKinstry, Susan
    MRS BULLETIN, 2012, 37 (11) : 1007 - 1021