Analysis of the contact probe mechanism for micro-coordinate measuring machines

被引：0
作者：
K.-Ch. Fan
F. Cheng
W. -T. Pan
R. Li
机构：
[1] Hefei University of Technology,School of Instrument Science and Optoelectronic Engineering
[2] National Taipei University of Technology,Department of Mechanical Engineering
来源：
Optoelectronics, Instrumentation and Data Processing | 2010年 / 46卷 / 4期
关键词：
contact probe; floating plate; stiffness; coordinate measuring machines;
D O I：
10.3103/S8756699010040060
中图分类号：
学科分类号：
摘要：
High precision contact scanning probes for measuring miniature components on micro- and nano-coordinate measuring machines requires sensitive mechanisms. This paper analyzes the mechanism of a developed contact probe in order to find its optimal dimensions. The contact probe is composed of a fiber stylus with a ball tip, a mechanism with a wire-suspended floating plate, and focus sensors. The wires experience elastic deformation when a contact force is applied. The probe mechanism with a four-wire floating plate is studied. Stiffness analysis is carried out using the theory of elasticity. It is found that, with a proper stylus length, a contact probe with uniform stiffness can be designed.
引用
收藏
页码：340 / 346
页数：6
相关论文
共 47 条
  • [21] TESTING OF THE REPEATABILITY OF STYLUS CHANGE OF MODULAR PROBES USED IN COORDINATE MEASURING MACHINES
    Wozniak, Adam
    XIX IMEKO WORLD CONGRESS: FUNDAMENTAL AND APPLIED METROLOGY, PROCEEDINGS, 2009, : 1993 - 1996
  • [22] Probability-Theoretical Model for Estimating Measurement Errors of Coordinate Measuring Machines
    Ruzanov, N., V
    Bolotov, M. A.
    Pechenin, V. A.
    2018 INTERNATIONAL SCIENTIFIC MULTI-CONFERENCE ON INDUSTRIAL ENGINEERING AND MODERN TECHNOLOGIES (FAREASTCON), 2018,
  • [23] Parametric calibration of 3-coordinate measuring machines by transfer standards & conventional techniques
    Khan, Abdul Wahid
    SEVENTH INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION AND CONTROL TECHNOLOGY: SENSORS AND INSTRUMENTS, COMPUTER SIMULATION, AND ARTIFICIAL INTELLIGENCE, 2008, 7127
  • [24] Development of micro contact detection probe for microhole quality control
    Ogura I.
    Okazaki Y.
    International Journal of Automation Technology, 2011, 5 (02) : 102 - 108
  • [25] Equivalent Error Based Modelling for Prediction and Analysis of Measuring Accuracy in 3-Axis FXYZ Coordinate Measuring Machines from Position, Repeatability and Reversibility Errors
    Jodar, J.
    Franco, P.
    INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2025, 26 (01) : 67 - 80
  • [26] Use of coordinate measuring machines for the assembly of axisymmetric two-mirror objectives with aspherical mirrors
    Venzel', V. I.
    Danilov, M. F.
    Savel'eva, A. A.
    Semenov, A. A.
    JOURNAL OF OPTICAL TECHNOLOGY, 2019, 86 (02) : 119 - 123
  • [27] Optimal Design of Contact Probes for Three-dimensional Thread Measuring Machines
    Yang Y.
    Yu J.
    Lin X.
    Cai J.
    Zhongguo Jixie Gongcheng/China Mechanical Engineering, 2021, 32 (15): : 1812 - 1817
  • [28] Analysis of spherical form errors to coordinate measuring machine data
    Chen, MC
    JSME INTERNATIONAL JOURNAL SERIES C-MECHANICAL SYSTEMS MACHINE ELEMENTS AND MANUFACTURING, 2002, 45 (02) : 647 - 656
  • [29] Minimum Zone Evaluation of Flatness Error Using an Adaptive Iterative Strategy for Coordinate Measuring Machines Data
    Ye, Ruifang
    Cui, Changcai
    Huang, Fugui
    Fan, Wei
    Yu, Qing
    ADVANCED MANUFACTURING TECHNOLOGY, PTS 1-4, 2012, 472-475 : 25 - 29
  • [30] Application of fuzzy logic methodology for predicting dynamic measurement errors related to process parameters of coordinate measuring machines
    Bulutsuz, Asli G.
    Yetilmezsoy, Kaan
    Durakbasa, Numan
    JOURNAL OF INTELLIGENT & FUZZY SYSTEMS, 2015, 29 (04) : 1619 - 1633
12345