Reverse Optimization of an Integrated Solenoid Fluxgate Sensor Based on Co-based Amorphous Soft Magnetic Ribbon

被引:0
|
作者
Chong Lei
Xue-Cheng Sun
Yong Zhou
机构
[1] Shanghai Jiao Tong University,Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Department of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering
来源
Journal of Electronic Materials | 2016年 / 45卷
关键词
Fluxgate sensor; MEMS; amorphous ribbon; apparent permeability;
D O I
暂无
中图分类号
学科分类号
摘要
In this paper, based on the sensitivity empirical formula, the microsolenoid fluxgate sensor is designed in reverse by making use of optimized parameters. The fabricated microsolenoid fluxgate sensor with a Co-based amorphous ribbon core presents a best sensitivity of 3587 V/T, a power consumption of 20.35 mW, and a linear range of 0–100 μT. The test results show that the sensitivity of the sensor is in good agreement with the theoretical expectation, with an error lower than 4%. The improvement of the core material makes a major contribution to the high sensitivity. The noise power density of the sensor is 0.14 nT/√Hz@1 Hz at the frequency of 100 kHz and the noise rms level is 2.2 nT in the frequency range of 0.1–10 Hz. Reverse design provides a simple and rapid way to optimize the performance of the existing fluxgate sensor for different applications.
引用
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页码:5356 / 5361
页数:5
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