Thermal stability of a freestanding EUV filter under long-term vacuum annealing at 700–1000°C

被引：0
|
作者：
S. A. Gusev
M. N. Drozdov
E. B. Kluenkov
A. Ya. Lopatin
V. I. Luchin
D. E. Pariev
A. E. Pestov
N. N. Salashchenko
N. N. Tsybin
N. I. Chkhalo
L. A. Shmaenok
机构：
[1] Russian Academy of Sciences,Institute for Physics of Microstructures
[2] PhysTeX,undefined
来源：
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques | 2012年 / 6卷
关键词：
Surface Investigation; Neutron Technique; Outward Appearance; Term Heating; Molybdenum Silicide;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Freestanding absorption filters based on Mo/Si and Mo/ZrSi2 are tested under conditions of long-term heating in vacuum in the temperature range 700–1000°C. The effect of high temperatures on the optical and structural characteristics of the films is studied. The critical thermal loads at which filters maintain their properties during many hours of testing are estimated. The mechanisms for the degradation of filter characteristics upon annealing are determined by means of secondary ion mass spectrometry (SIMS) data and optical measurements.
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页码：482 / 486
页数：4
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