STRUCTURE - THERMAL PROPERTIES RELATIONSHIP IN VOLATILE HETEROMETALLIC COMPLEXES USED IN CVD OF Cu–Pt AND Cu–Pd FILMS

被引:0
作者
V. V. Krisyuk
N. A. Kryuchkova
V. Yu. Komarov
D. P. Pishchur
机构
[1] Nikolaev Institute of Inorganic Chemistry,
[2] Siberian Branch,undefined
[3] Russian Academy of Sciences,undefined
来源
Journal of Structural Chemistry | 2022年 / 63卷
关键词
volatile heterometallic complexes; crystal structure; electronic structure; thermal properties; chemical vapor deposition; mixed-metal Cu–Pt and Cu–Pd precursors.;
D O I
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学科分类号
摘要
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页码:1070 / 1078
页数:8
相关论文
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