The direct measurement of linewidth using an atomic force microscope

被引：0
|
作者：
Yu. A. Novikov
A. V. Rakov
P. A. Todua
机构：
[1] Russian Academy of Sciences,A. M. Prokhorov Institute of General Physics
[2] Research Center for Study of Surface and Vacuum Properties,undefined
来源：
Measurement Techniques | 2008年 / 51卷
关键词：
atomic force microscope; linewidth;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A method for directly measuring linewidth with an atomic force microscope using the first derivative of the signal is presented. The method showed that it is possible to make a direct measurement of the size of the upper base of a trapezoidal protrusion down to 30 nm.
引用
收藏
页码：470 / 474
页数：4
相关论文
共 50 条
  • [1] The direct measurement of linewidth using an atomic force microscope
    Novikov, Yu. A.
    Rakov, A. V.
    Todua, P. A.
    MEASUREMENT TECHNIQUES, 2008, 51 (05) : 470 - 474
  • [2] DIRECT MEASUREMENT OF THE DEPLETION FORCE USING AN ATOMIC-FORCE MICROSCOPE
    MILLING, A
    BIGGS, S
    JOURNAL OF COLLOID AND INTERFACE SCIENCE, 1995, 170 (02) : 604 - 606
  • [3] DIRECT MEASUREMENT OF COLLOIDAL FORCES USING AN ATOMIC FORCE MICROSCOPE
    DUCKER, WA
    SENDEN, TJ
    PASHLEY, RM
    NATURE, 1991, 353 (6341) : 239 - 241
  • [4] Direct surface force measurement for synthetic smectites using the atomic force microscope
    Nishimura, S
    Kodama, M
    Yao, K
    Imai, Y
    Tateyama, H
    LANGMUIR, 2002, 18 (12) : 4681 - 4688
  • [5] Direct measurement of the force of adhesion of a single biological cell using an atomic force microscope
    Bowen, WR
    Hilal, N
    Lovitt, RW
    Wright, CJ
    COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS, 1998, 136 (1-2) : 231 - 234
  • [6] FORCE MEASUREMENT USING AN AC ATOMIC FORCE MICROSCOPE
    DUCKER, WA
    COOK, RF
    CLARKE, DR
    JOURNAL OF APPLIED PHYSICS, 1990, 67 (09) : 4045 - 4052
  • [7] Fabrication and characterization of spherical zirconia particles for direct force measurement using the atomic force microscope
    Hook, MS
    Hartley, PG
    Thistlethwaite, PJ
    LANGMUIR, 1999, 15 (19) : 6220 - 6225
  • [8] Direct measurement of repulsive van der Waals interactions using an atomic force microscope
    Milling, A
    Mulvaney, P
    Larson, I
    JOURNAL OF COLLOID AND INTERFACE SCIENCE, 1996, 180 (02) : 460 - 465
  • [9] Direct measurement of nanoscale sidewall roughness of optical waveguides using an atomic force microscope
    Jang, JH
    Zhao, W
    Bae, JW
    Selvanathan, D
    Rommel, SL
    Adesida, I
    Lepore, A
    Kwakernaak, M
    Abeles, JH
    APPLIED PHYSICS LETTERS, 2003, 83 (20) : 4116 - 4118
  • [10] Characterisation of membrane surfaces: direct measurement of biological adhesion using an atomic force microscope
    Bowen, WR
    Hilal, N
    Lovitt, RW
    Wright, CJ
    JOURNAL OF MEMBRANE SCIENCE, 1999, 154 (02) : 205 - 212
12345