System for recording and analysis of reflection high-energy electron diffraction patterns

被引：0
|
作者：
G. M. Gur’yanov
V. N. Demidov
N. P. Korneeva
V. N. Petrov
Yu. B. Samsonenko
G. É. Tsyrlin
机构：
[1] Russian Academy of Sciences,Institute of Analytical Instrument Making
来源：
Technical Physics | 1997年 / 42卷
关键词：
Reflection; Diffraction Pattern; GaAs; Electron Diffraction; Program Package;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
An efficient and fast system for recording and analysis of reflection high-energy electron diffraction (RHEED) patterns is described. The software developed for this system includes three program packages: one for operating in the single-window mode, one for operating in the four-window mode, and one for the linear regime. Examples are given of the use of the system for monitoring and control of growth of III–V semiconductor compounds by molecular-beam epitaxy. Using this system, we discovered an effect wherein a periodic splitting of the RHEED peaks occurs during the growth of GaAs (100).
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页码：956 / 960
页数：4
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