Effect of film thickness and curing temperature on the sensitivity of ZnO:Sb thick-film hydrogen sensor

被引：0
作者：
N. JAYADEV DAYAN
R. N KAREKAR
R. C AIYER
S. R SAINKAR
机构：
[1] University of Pune,Centre for Advanced Study in Materials Science and Solid State Physics, Department of Physics
[2] National Chemical Laboratory,undefined
来源：
Journal of Materials Science: Materials in Electronics | 1997年 / 8卷
关键词：
Depletion Region; Hydrogen Sensor; Show Scanning Electron Micrographs; Light Section Microscope; High Film Thickness;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
This paper reports the effect of film thickness and curing temperature on the sensitivity of the screen-printed thick-film ZnO (incorporated with 7 wt%Sb) H2, CO and CH4 sensors. The sensitivity of the sensors increases up to 60 μm and decreases for higher film thickness. Increase in the curing temperature of the films, decreases the sensitivity of the sensors because of the increase in the average grain size, as observed by scanning electron microscopy.
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页码：277 / 279
页数：2
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