Tribological properties of DLC film prepared by C+ ion beam-assisted deposition (IBAD)

被引：0
作者：
Bai X. [1 ,3 ]
Böhm P. [2 ]
Li J. [3 ]
Yan X. [1 ]
机构：
[1] Reliability Engineering Institute, Wuhan University of Technology
[2] IAVF Antriebstechnik
[3] Wuhan Research Institute of Materials Protection
来源：
J Wuhan Univ Technol Mater Sci Ed | 2006年 / 1卷 / 49-52期
基金：
中国国家自然科学基金;
关键词：
C[!sup]+[!/sup] ion beam-assisted deposition (IBAD); DLC film; Tribological properties;
D O I：
10.1007/BF02861469
中图分类号：
学科分类号：
摘要：
C+ ion beam-assisted deposition was utilized to prepare deposit diamond-like carbon (DLC) film. With the help of a series of experiments such as Roman spectroscopy, FT-IR spectroscopy, AFM and nano-indentation, the DLC film has been recognized as hydrogenated DLC film and its tribological properties have been evaluated. The ball-on-disc testing results show that the hardness and the tribological properties of the DLC film produced by C+ ion beam-assisted deposition are improved significantly. DLC film produced by C+ ion beam-assisted deposition is positive to have a prosperous tribological application in the near future.
引用
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页码：49 / 52
页数：3
相关论文
共 26 条
  • [1] Veerasamy V S(2003)Diamond-like Amorphous Carbon Coatings for Large Areas of Glass Thin Solid Films 442 1-10
  • [2] Luten H A(2003)Pre-treat-ment of Substrates for Improved Adhesion of Diamond-like Carbon Films on Surgically Implantable Metals Deposited by Saddle Field Neutral Beam Source Surf. Coat. Technol. 174-175 579-583
  • [3] Petrmichl R H(2004)An Overview on the Tribological Behavior of Dia-mond-like Carbon in Technical and Medical Applications Tri-bology International 37 991-1003
  • [4] Morshed M M(2003)Tri-bological Behavior of Hard Carbon Coatings on Steel Sub-strates Wear 255 854-858
  • [5] Cameron D C(2000)Mechanical and Tri-bological Properties of Non-hydrogenated DLC Films Synthe-sized by IBAD Surf. Coat. Technol. 128-129 324-328
  • [6] McNamara B P(2003)Frictional Behavior of Di-amondlike Carbon Films in Vacuum and Undervarying Water Vapor Pressure Surf. Coat. Technol. 163-164 535-540
  • [7] Hauert R(2004)Genesis of Superlow Friction and Wear in Dia-mondlike Carbon Films Tribology International 37 1005-1012
  • [8] Kennedy Francis E(2000)Property Change of Dia-mond-like Carbon Thin Films Due to Ion Implantation Nucl. Instrum. Methods phys. Res. B 166-167 415-419
  • [9] Lidhagen David(2003)XPS and Laser Raman Analysis of Hydrogenated Amorphous Carbon Films Diamond Relat. Mater. 12 974-978
  • [10] Erdemir Ali(2001)Structure-property Rela-tionship of Si-DLC Films Surf. Coat. Technol 148 305-314
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