Generation of Homogeneous Gas-Discharge Beam-Plasma Formations in an Extended Hollow-Cathode of a High-Current Glow Discharge

被引:0
作者
E. V. Ostroverkhov
V. V. Denisov
Yu. A. Denisova
S. S. Kovalsky
A. A. Leonov
机构
[1] Institute of High Current Electronics of the Siberian Branch of the Russian Academy of Sciences,
来源
Russian Physics Journal | 2022年 / 65卷
关键词
hollow cathode glow discharge; discharge anode; plasma concentration distribution; inhomogeneity coefficient; electron flux;
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中图分类号
学科分类号
摘要
Regular features of the generation of gas-discharge beam-plasma formations formed in a high-current non-self-sustained glow discharge at low (≈1 Pa) pressure in an extended, 1.2 m long, hollow cathode with a volume of 0.34 m3 with a length-to-diameter ratio of 2: 1 are investigated. It is shown that in a system with one electron source providing injection of electrons into the hollow cathode of a glow discharge, a sharp nonuniformity (≈40%) of the nitrogen plasma concentration distribution is observed. In an extended hollow cathode, the problem of inhomogeneity of the plasma concentration distribution is solved by using two electron sources, which provides an injection of electrons from the auxiliary arc plasma into the hollow cathode of the glow discharge. The use of two electron sources makes it possible to form beam-plasma formations with an inhomogeneity of no more than 18%. A source of beam-plasma formations based on a non-self-sustained glow discharge with an extended hollow cathode is used for ion-plasma treatment of Cr12MoV die steel products.
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页码:141 / 149
页数:8
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