The origin of constant phase element in equivalent circuit of MIS (n) GaAs structures

The Au/Pd/Ti–SiO2-(n) GaAs properties have been analyzed via impedance spectroscopy (IS), as well as DLTS and ICTS, to identify the origin of electron processes responsible for existence of constant phase elements (CPE) in an equivalent circuits of that structure. We showed that CPEs connected in series with resistance represents the electron processes associated with deep levels in GaAs and/or interface states at SiO2-(n) GaAs interface, depending on the value of n of CPE parameter. CPE with n close to 1 characterize the electron processes associated with EL2 deep level, and CPE with n = 0.5–0.65 the complex electron processes associated with EL3 deep level and interface states together. We stated that constant phase elements in equivalent circuits of MIS-GaAs structures with large frequency dispersion of electrical characteristics can be the result of more than one electron process.