Influence of Mixture Composition on Electrophysical Parameters and Emission Spectra of Trifluoromethane Plasma with Oxygen and Argon

被引：0
作者：
S. A. Pivovarenok
D. B. Murin
A. Yu. Grazhdyan
机构：
[1] Ivanovo State University of Chemistry and Technology,
来源：
High Energy Chemistry | 2023年 / 57卷
关键词：
plasma; electrophysical parameters; spectra; trifluoromethane; oxygen; argon;
D O I：
暂无
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学科分类号：
摘要：
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页码：163 / 167
页数：4
相关论文
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