Orientation Imaging Microscopy for the Transmission Electron Microscope

被引:0
|
作者
David J. Dingley
机构
[1] TSL-EDAX and Bristol University,
来源
Microchimica Acta | 2006年 / 155卷
关键词
Key words: Orientation imaging; transmission electron microscopy; conical dark field.;
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中图分类号
学科分类号
摘要
The resolution limit of Orientation Imaging Microscopy in the Scanning Electron Microscope is between 20 nA and 80 nA depending on the basic resolution/beam current performance of the SEM, the sample atomic number and the level of residual strain within it. The newer technique of orientation imaging in the transmission electron microscope, TEM, improves on this resolution limit by a factor of five to ten.
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页码:19 / 29
页数:10
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