Highly reproducible large-area and double-sided pulsed laser deposition of HTSC YBCO:Ag thin films for microwave applications

被引：0

作者：

M. Lorenz

H. Hochmuth

D. Natusch

K. Kreher

机构：

[1] Universität Leipzig,

[2] Fakultät für Physik und Geowissenschaften,undefined

[3] Linnéstr. 5,undefined

[4] 04103 Leipzig,undefined

[5] Germany (Fax: +49-341/97-32 698,undefined

[6] E-mail: mlorenz@physik.uni-leipzig.de),undefined

来源：

Applied Physics A | 1999年 / 69卷

关键词：

PACS: 81.15.Fg; 74.76.Bz; 84.30.Vn;

D O I：

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学科分类号：

摘要：

Large-area pulsed laser deposition (PLD) producing high-quality YBa2Cu3O7-x (YBCO) thin films on both sides of R-plane sapphire substrates with CeO2 buffer layer is used routinely to optimize planar microwave stripline filters for satellite and mobile communication systems. A relatively simple PLD arrangement with fixed laser plume and rotating substrate, with an offset between the laser plume and the center of the substrate is employed to deposit laterally homogeneous 3-inch-diameter Ag-doped YBCO thin films.

引用

页码：S905 / S911