Room-temperature and fast response hydrogen sensor based on annealed nanoporous palladium film

被引：0
作者：
Mengmeng Hao
Shuanghong Wu
Han Zhou
Wenbin Ye
Xiongbang Wei
Xiangru Wang
Zhi Chen
Shibin Li
机构：
[1] University of Electronic Science and Technology of China,School of Optoelectronic Information and State Key Laboratory of Electronic Thin Films & Integrated Devices
[2] University of Kentucky,Department of Electrical & Computer Engineering and Center for Nanoscale Science & Engineering
来源：
Journal of Materials Science | 2016年 / 51卷
关键词：
Hydrogen Concentration; Anodic Aluminum Oxide; Anodic Aluminum Oxide Template; Hydrogen Sensor; Porous Anodic Aluminum Oxide Template;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Hydrogen sensor based on nanoporous palladium film with a short response time at room temperature has been investigated. Nanoporous palladium film was deposited on treated porous anodic aluminum oxide template by DC magnetron sputtering. We have researched the detection performance of the hydrogen sensor depending on different post-deposition annealing temperatures ranging from 150 to 400 °C. In this sensor, we obtained a sensor response time as short as 30 s at 1 % hydrogen concentration with an anneal temperature of 200 °C. The sensor exhibited good performance under hydrogen concentrations from 0.1 to 1 %.
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页码：2420 / 2426
页数：6
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